High crystalline quality of SiGe fin fabrication with Si-rich composition area using replacement fin processing
SMF images of SiGe SEG from bottom to top along fin direction, for (a) Si substrate, (b) SiGe between STI oxides.
High crystalline quality of SiGe fin fabrication with Si-rich composition area using replacement fin processing |
SMF images of SiGe SEG from bottom to top along fin direction, for (a) Si substrate, (b) SiGe between STI oxides. |
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