Selective linear etching of monolayer black phosphorus using electron beams

Pan Yuhao¹, Lei Bao^{2, 1}, Qiao Jingsi¹, Hu Zhixin³, Zhou Wu², Ji Wei^{1, ‡}

Five kinds of calculated edges in monolayer BP. Top views (a)–(e) and side views (f)–(j) of the atomic structures of the edges we focused on in monolayer BP. (k)–(o) Crystal directions of the corresponding edges.