Selective linear etching of monolayer black phosphorus using electron beams

Pan Yuhao¹, Lei Bao^{2, 1}, Qiao Jingsi¹, Hu Zhixin³, Zhou Wu², Ji Wei^{1, ‡}

Atomic structures of BP with vacancies and zigzag chain vacancy. (a)–(c) Top and side views of atomic structures of BP with double-atom vacancy (V_2P), triple-atom vacancy (V_3P), and quadruple-atom vacancy (V_4P) with the tested atoms marked on them. (d) Predicted zigzag chain vacancy in monolayer BP.