Stress and strain analysis of Si-based III – V template fabricated by ion-slicing

Zhao Shuyan^{1, 2}, Song Yuxin¹, Liang Hao^{1, 2}, Jin Tingting^{1, 2}, Lin Jiajie^{1, 2}, Yue Li^{1, 2}, You Tiangui^{1, 2}, Wang Chang^{1, 2}, Ou Xin^{1, 2, †}, Wang Shumin^{1, 2, 3, ‡}

(a) The chronicle vertical temperature gradient within the structure A and (b) the strain component ε_xx at the center of the layers versus time during heating process.