Quadruple-stacked Nb/Nb
x
Si
1 –
x
/Nb Josephson junctions for large-scale array application
Cao Wenhui
, Li Jinjin
†
, Wang Lanruo
, Zhong Yuan
, Zhong Qing
Schematic of co-sputtering deposition of the Nb
x
Si
1 –
x
barrier.