Experimental evaluation of interface states during time-dependent dielectric breakdown of GaN-based MIS-HEMTs with LPCVD-SiN<sub><i>x</i></sub> gate dielectric

Experimental evaluation of interface states during time-dependent dielectric breakdown of GaN-based MIS-HEMTs with LPCVD-SiN_x gate dielectric

Zhao Ya-Wen^{1, †}, Li Liu-An^{1, †}, Que Tao-Tao¹, Qiu Qiu-Ling¹, He Liang², Liu Zhen-Xing¹, Zhang Jin-Wei¹, Wu Qian-Shu¹, Chen Jia¹, Wu Zhi-Sheng¹, Liu Yang^{1, ‡}

Schematic structure (a) and optical image (b) of the multi-finger GaN-based MIS-HEMT using LPCVD-SiN_x as gate dielectric.