Extended damage range of (Al0.3Cr0.2Fe0.2Ni0.3)3O4 high entropy oxide films induced by surface irradiation |
HAADF image (a) and EDS-mapping images of Ni (b), Fe (c), Cr (d), Al (e), and O (f) of the irradiated HEO films with an irradiation fluence of 1.8× 1021 cm−2. |