Extended damage range of (Al0.3Cr0.2Fe0.2Ni0.3)3O4 high entropy oxide films induced by surface irradiation

Extended damage range of (Al_0.3Cr_0.2Fe_0.2Ni_0.3)₃O₄ high entropy oxide films induced by surface irradiation

Zhang Jian-Cong, Sun Sen, Yang Zhao-Ming, Qiu Nan, Wang Yuan^‡

Cross-sectional TEM image (a), HRTEM image [(b) and (c)], and the inverse fast Fourier transform (IFFT) image (f) of the irradiated HEO film at an fluence of 1.8× 10²¹ cm⁻². Cross-sectional TEM (d) and HRTEM (e) images of the pristine HEO film.