In situ luminescence measurement of 6H-SiC at low temperature
Qiu Meng-Lin1, Yin Peng1, Wang Guang-Fu1, 2, †, Song Ji-Gao1, Luo Chang-Wei1, Wang Ting-Shun1, Zhao Guo-Qiang1, Lv Sha-Sha1, Zhang Feng-Shou1, 2, Liao Bin1
The IBIL spectrum of n-type 6H-SiC irradiated by 2 MeV H+ with the same fluence (5 × 1011 ions/cm2) at different temperatures (a) and normalized to the maximum (b).