Role of remote Coulomb scattering on the hole mobility at cryogenic temperatures in SOI p-MOSFETs*

Project supported by the National Natural Science Foundation of China (Grant Nos. 61674008, 61421005, and 61804003), the National Key Research and Development Program of China (Grant No. 2016YFA0202101), and the China Postdoctoral Science Foundation (Grant Nos. 2018M630034 and 2019T120017).

Zhang Xian-Le, Chang Peng-Ying, Du Gang, Liu Xiao-Yan
       

Calculated mobility versus the hole sheet density for the trap charges in two different positions in the front oxide at 4.2 K. The charges density here is set to be 8 × 1011 cm−2. Δ = 0.4 nm and Λ = 1.6 nm are used for the SR scattering parameters.