Effect of overdrive voltage on PBTI trapping behavior in GaN MIS-HEMT with LPCVD SiNx gate dielectric*

Project supported by the National Key Research and Development Program, China (Grant No. 2017YFB0402800), the Key Research and Development Program of Guangdong Province, China (Grant No. 2019B010128002), the National Natural Science Foundation of China (Grant No. U1601210), and the Natural Science Foundation of Guangdong Province, China (Grant No. 2015A030312011).

Que Tao-Tao1, Zhao Ya-Wen1, Li Liu-An1, He Liang2, Qiu Qiu-Ling1, Liu Zhen-Xing1, Zhang Jin-Wei1, Chen Jia1, Wu Zhi-Sheng1, Liu Yang1, †
       

(a) Plots of weak gmax degradation versus tstress, observed under different values of Vgstress and room temperature, (b) linear correlation between Δgmax and ΔVth, (c) plots of SS degradation versus tstress, and (d) correlation between ΔSS and ΔVth.