Growth and doping of bulk GaN by hydride vapor phase epitaxy
Zhang Yu-Min1, 2, Wang Jian-Feng1, 2, †, Cai De-Min2, Ren Guo-Qiang1, Xu Yu1, 2, Wang Ming-Yue1, 2, Hu Xiao-Jian1, 2, Xu Ke1, 2, ‡
       

(a) The schematic diagram of GaN samples sliced from a GaN boule grown by HVPE, (b) the dislocation density and Si concentration for each sample, (c) the relationship between mobility and temperature for each sample, (d) the relationship between mobility and temperature for sample S1. μdisl, μac, μi indicate the mobility due to dislocations, acoustic phonons, and ionized impurities. μExp and μT indicate the experimental results and the calculated values according to the model.