Effects of deposition temperature on optical properties of MgF<sub>2</sub> over-coated Al mirrors in the VUV<xref rid="cpb_28_11_117801_fn1" ref-type="fn">*</xref><fn id="cpb_28_11_117801_fn1"><label>*</label><p>Project supported by the West Light Foundation of the Chinese Academy of Sciences and the National Natural Science Foundation of China (Grant No. 61805247).</p></fn>

Effects of deposition temperature on optical properties of MgF₂ over-coated Al mirrors in the VUV**

Project supported by the West Light Foundation of the Chinese Academy of Sciences and the National Natural Science Foundation of China (Grant No. 61805247).

Guo Chun^{1, 2, †}, Li Bin-Cheng³, Kong Ming-Dong^{1, 4}, Lin Da-Wei¹

Plot of substrate temperature and pressure versus time in coating chamber.