Nb-based Josephson parametric amplifier for superconducting qubit measurement Project supported by the Science Funds from the Ministry of Science and Technology of China (Grant Nos. 2015CB921104 and 2016YFA0300601), the National Natural Science Foundation of China (Grant Nos. 11674380 and 11874063), the Strategic Priority Research Program of the Chinese Academy of Sciences (Grant Nos. XDB07010300 and XDB28000000), and the Key Research and Development Program of Guangdong Province, China (Grant No. 2018B030326001). |
False-colored optical photograph of the IMPA fabricated in this work. The IMPA consists of a long CPW covered with density varied crossovers, part of which is shown in the right inset, a planar shunt capacitor, and a dc SQUID with flux bias line. The two Josephson junctions locate in the middle of the two thin lines as pointed at by an arrow in the left inset. The width of the sample area shown in the main panel is 3 mm while the length of the crossover strips in the insets is about 35 μm. |