Low insertion loss silicon-based spatial light modulator with high reflective materials outside Fabry

Low insertion loss silicon-based spatial light modulator with high reflective materials outside Fabry–Perot cavity

Tian Li-Fei^{1, 2}, Kuang Ying-Xin^{1, 2}, Fan Zhong-Chao^{2, †}, Li Zhi-Yong^{1, ‡}

Reflectivity spectra of spatial light modulator at voltages (a) from 0 V to 6 V, and (b) from 8 V to 11 V, and (c) at 1550 nm.