Low insertion loss silicon-based spatial light modulator with high reflective materials outside Fabry

Low insertion loss silicon-based spatial light modulator with high reflective materials outside Fabry–Perot cavity

Tian Li-Fei^{1, 2}, Kuang Ying-Xin^{1, 2}, Fan Zhong-Chao^{2, †}, Li Zhi-Yong^{1, ‡}

Morphologies and surface roughness of 6-pair Ta₂O₅/SiO₂ thin films: (a) cross-section and surface (inset) SEM image, and (b) two-dimensional and three-dimensional (inset) AFM image.