Low insertion loss silicon-based spatial light modulator with high reflective materials outside Fabry

Low insertion loss silicon-based spatial light modulator with high reflective materials outside Fabry–Perot cavity

Tian Li-Fei^{1, 2}, Kuang Ying-Xin^{1, 2}, Fan Zhong-Chao^{2, †}, Li Zhi-Yong^{1, ‡}

(a) Measured refractivity versus wavelength of SiO₂ and Ta₂O₅ thin films, (b) simulated and measured reflectivity spectrums of 6-pair Ta₂O₅/SiO₂ thin film.