Low insertion loss silicon-based spatial light modulator with high reflective materials outside Fabry

Low insertion loss silicon-based spatial light modulator with high reflective materials outside Fabry–Perot cavity

Tian Li-Fei^{1, 2}, Kuang Ying-Xin^{1, 2}, Fan Zhong-Chao^{2, †}, Li Zhi-Yong^{1, ‡}

Schematic diagram of designed spatial light modulator unit with FP cavity: (a) schematic diagram of cross section and (b) schematic diagram of heating electrode on surface of isolation layer.