Performance improvement of 4H-SiC PIN ultraviolet avalanche photodiodes with different intrinsic layer thicknesses |
(a) Dark current of PIN-0.5 measured as a function of temperature ranging from RT to 140 °C, The inset shows the dark current measured at different temperatures near the avalanche region. (b) The Vbr variation measured as a function of temperature and the calculated temperature coefficient of the four APDs. |