Study on the nitridation of β-Ga2O3 films
XRD patterns of β-Ga2O3 films after nitridation at 1050 °C for different times (a). The XRC patterns of GaN (002) and (102) formed at 1050 °C for different times (b).
Study on the nitridation of β-Ga2O3 films |
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XRD patterns of β-Ga2O3 films after nitridation at 1050 °C for different times (a). The XRC patterns of GaN (002) and (102) formed at 1050 °C for different times (b). |
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