Study on the nitridation of β-Ga2O3 films
The SEM images of β-Ga2O3 films after nitridation at 1050 °C for different times. The insets are SEM images in the higher magnification.
Study on the nitridation of β-Ga2O3 films |
|
The SEM images of β-Ga2O3 films after nitridation at 1050 °C for different times. The insets are SEM images in the higher magnification. |
| |