Study on the nitridation of β-Ga2O3 films

Study on the nitridation of β-Ga₂O₃ films

Cheng Fei¹, Li Yue-Wen¹, Zhao Hong^{1, †}, Xiu Xiang-Qian^{1, 2, ‡}, Jia Zhi-Tai², Liu Duo², Hua Xue-Mei¹, Xie Zi-Li¹, Tao Tao¹, Chen Peng¹, Liu Bin¹, Zhang Rong^{1, §}, Zheng You-Dou¹

XRD patterns of β-Ga₂O₃ film and the samples after nitridation at different temperatures for 0.5 h.