Study on the nitridation of β-Ga2O3 films
The SEM images of β-Ga2O3 film and the samples after nitridation at different temperatures for 0.5 h. The insets are SEM images in the higher magnification.
Study on the nitridation of β-Ga2O3 films |
|
The SEM images of β-Ga2O3 film and the samples after nitridation at different temperatures for 0.5 h. The insets are SEM images in the higher magnification. |
| |