High quality NbTiN films fabrication and rapid thermal annealing investigation

Ge Huan¹, Jin Yi-Rong^{1, 2}, Song Xiao-Hui^{1, †}

(a) The relationship between superconductor transition temperature and annealing temperature for 10 nm NbTiN films in N₂ or N₂/H₂ mixture. (b) The rise of T_c after RTA at 450 °C in two kinds of atmospheres.