High quality NbTiN films fabrication and rapid thermal annealing investigation

Ge Huan¹, Jin Yi-Rong^{1, 2}, Song Xiao-Hui^{1, †}

(a) XRD patterns of 300 nm NbTiN films rapid thermal annealing in N₂ atmosphere. (b) The ratio of [200] and [111] XRD peaks as the function of annealing temperature. The inset shows the grain size increasing with the RTA temperature.