High quality NbTiN films fabrication and rapid thermal annealing investigation
The AFM topographic images of NbTiN thin films with thicknesses of (a) 10 nm, (b) 30 nm, (c) 60 nm, and (d) 300 nm.
High quality NbTiN films fabrication and rapid thermal annealing investigation |
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The AFM topographic images of NbTiN thin films with thicknesses of (a) 10 nm, (b) 30 nm, (c) 60 nm, and (d) 300 nm. |
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