High quality NbTiN films fabrication and rapid thermal annealing investigation

Ge Huan¹, Jin Yi-Rong^{1, 2}, Song Xiao-Hui^{1, †}

(a) Some representative resistivity versus temperature for different thickness NbTiN films. (b) Superconductor transition temperature T_c and superconductor transition width Δ T c (from 90% ρ 20 K to 10% ρ 20 K ) (inset) for different thickness films.