High quality NbTiN films fabrication and rapid thermal annealing investigation
Ge Huan1, Jin Yi-Rong1, 2, Song Xiao-Hui1, †
       

The dependence of superconducting transition temperature Tc and surface roughness on (a) the total Ar and N2 gas pressure and (b) the sputtering power during magnetron sputtering (film thickness 300 nm).