Direct simulation Monte Carlo study of metal evaporation with collimator in e-beam physical vapor deposition
Comparison of DSMC and neodymium experimental deposition rate profiles. The lines represent DSMC and the circles represent experimental data; the black color indicates 50 cm and 142 mg/min, the red color indicates 70 cm and 183 mg/min, and the blue color indicates 70 cm and 266 mg/min. (a) Length direction; (b) width direction.
