Direct simulation Monte Carlo study of metal evaporation with collimator in e-beam physical vapor deposition
Lu Xiaoyong1, 2, †, Chai Junjie2
       

Comparison of DSMC and cerium experimental deposition thickness profiles. The lines represent DSMC and the circles represent experimental data; the blue color indicates 50 cm and the red color indicates 70 cm. (a) Length direction; (b) width direction.