Direct simulation Monte Carlo study of metal evaporation with collimator in e-beam physical vapor deposition
Lu Xiaoyong1, 2, †, Chai Junjie2
       

Relationship between the profile of deposition thickness and the width of the liquid metal pool at a moderate evaporation rate. (a) Narrow aperture ( 5.0 mg · cm − 1 · min − 1 ); (b) wide aperture ( 10.0 mg · cm − 1 · min − 1 ).