Direct simulation Monte Carlo study of metal evaporation with collimator in e-beam physical vapor deposition
Lu Xiaoyong1, 2, †, Chai Junjie2
Relationship between profile of deposition thickness and width of liquid metal pool at a low evaporation rate. (a) Narrow aperture (1.0mg·cm−1·min−1); (b) wide aperture (2.0mg·cm−1·min−1).