Direct simulation Monte Carlo study of metal evaporation with collimator in e-beam physical vapor deposition
Lu Xiaoyong1, 2, †, Chai Junjie2
Relationship between profile of deposition thickness and boundary conditions at a high evaporation rate. (a) Narrow aperture (20.0mg·cm−1·min−1); (b) wide aperture (40.0mg·cm−1·min−1).