Direct simulation Monte Carlo study of metal evaporation with collimator in e-beam physical vapor deposition
Lu Xiaoyong1, 2, †, Chai Junjie2
Relationship between profile of deposition rates and boundary conditions at a moderate evaporation rate. (a) Narrow aperture (5.0mg·cm−1·min−1); (b) wide aperture (10.0mg·cm−1·min−1).