Direct simulation Monte Carlo study of metal evaporation with collimator in e-beam physical vapor deposition
Lu Xiaoyong1, 2, †, Chai Junjie2
       

Relationship between profile of deposition rates and boundary conditions at a low evaporation rate. (a) Narrow aperture ( 1.0 mg · cm − 1 · min − 1 ); (b) wide aperture ( 2.0 mg · cm − 1 · min − 1 ).