Design and fabrication of 10-kV silicon–carbide p-channel IGBTs with hexagonal cells and step space modulated junction termination extension

Wen Zheng-Xin^{1, 2}, Zhang Feng^{1, 2, 3, †}, Shen Zhan-Wei¹, Chen Jun^{1, 2}, He Ya-Wei^{1, 2}, Yan Guo-Guo¹, Liu Xing-Fang¹, Zhao Wan-Shun¹, Wang Lei¹, Sun Guo-Sheng^{1, 2}, Zeng Yi-Ping^{1, 2}

(color online) (a) Photograph of the fabricated IGBT wafer, (b) top-view photography of SiC IGBT with I-cell layout, (c) top-view photography of SiC IGBT with H-cell layout.