Gradient refractive structured NiCr thin film absorber for pyroelectric infrared detectors
Lian Yunlu, Yu He, Liang Zhiqing, Dong Xiang
       

SEM top view of NiCr absorption deposited at different pressure atmospheres (a) 4 Pa, (b) 8 Pa, and (c) 12 Pa and sputter currents (d) 0.4 A, (e) 0.3 A, and (f) 0.2 A.