Gradient refractive structured NiCr thin film absorber for pyroelectric infrared detectors |
SEM top view of NiCr absorption deposited at different pressure atmospheres (a) 4 Pa, (b) 8 Pa, and (c) 12 Pa and sputter currents (d) 0.4 A, (e) 0.3 A, and (f) 0.2 A. |