Fabrication and characterization of one-port surface acoustic wave resonators on semi-insulating GaN substrates

Ji Xue^{1, 2}, Dong Wen-Xiu², Zhang Yu-Min^{1, 2}, Wang Jian-Feng², Xu Ke^{2, 3, †}

Transmission characteristics of two SAW delay lines. SAW devices are based on GaN film and bulk GaN, respectively. Wavelengths for both delay lines are 8 μ m . The resonance marked by R located at about 470 MHz is Rayleigh mode.