Fabrication and characterization of one-port surface acoustic wave resonators on semi-insulating GaN substrates
(a) Schematic presentation of one-port SAWR, and (b) SEM image of IDT fingers.
Fabrication and characterization of one-port surface acoustic wave resonators on semi-insulating GaN substrates |
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(a) Schematic presentation of one-port SAWR, and (b) SEM image of IDT fingers. |
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