Electrically triggered dual-band tunable terahertz metamaterial band-pass filter based on Si3N4–VO2

Electrically triggered dual-band tunable terahertz metamaterial band-pass filter based on Si₃N₄–VO₂–Si₃N₄ sandwich

Zhao Shuai¹, Hu Fangrong^{1, †}, Xu Xinlong², Jiang Mingzhu¹, Zhang Wentao¹, Yin Shan¹, Jiang Wenying¹

The fabrication process flow.