Ultraviolet photodetectors based on wide bandgap oxide semiconductor films |
(a) Spectral responsivity of the ITO/H-NiO (high conductivity NiO)/IGZO/ITO photodetector under the bias of −3 V. The inset shows the responsivity as a function of the reverse bias. (b) Normalized spectral responsivities of the ITO/L–NiO (low conductivity NiO)/IGZO/ITO, ITO/M–NiO (medium conductivity NiO)/IGZO/ITO, and ITO/H–NiO/IGZO/ITO photodetector structures at -3-V bias.[ |