Effects of helium implantation on mechanical properties of (Al0.31Cr0.20Fe0.14Ni0.35)O high entropy oxide films

Effects of helium implantation on mechanical properties of (Al_0.31Cr_0.20Fe_0.14Ni_0.35)O high entropy oxide films

Yang Zhao-Ming^{1, 2}, Zhang Kun¹, Qiu Nan¹, Zhang Hai-Bin², Wang Yuan^{1, †}, Chen Jian^{3, ‡}

Schematic illustration of the relationship between the grain boundary cavities induced by He implantation and the creep resistance of the HEO films: (a) the as-deposited HEO film, (b) indentation diagram of the as-deposited film, (c) force-displacement curve of films, (d) He-implanted film, (e) indentation diagram of He-implanted film, and (f) enlargement image of corresponding region in panel 8(e).