Effects of helium implantation on mechanical properties of (Al0.31Cr0.20Fe0.14Ni0.35)O high entropy oxide films

Effects of helium implantation on mechanical properties of (Al_0.31Cr_0.20Fe_0.14Ni_0.35)O high entropy oxide films

Yang Zhao-Ming^{1, 2}, Zhang Kun¹, Qiu Nan¹, Zhang Hai-Bin², Wang Yuan^{1, †}, Chen Jian^{3, ‡}

RBS spectrum and simulated spectrum of (a) as-deposited (Al–Cr–Fe–Ni)O HEO film, (Al–Cr–Fe–Ni)O HEO films with (b) 0.1-Pa He, (c) 0.2-Pa He, and (d) 0.3-Pa He implantation.