Development of small pixel HgCdTe infrared detectors
(a) The 3D integrated LWIR FPA design schematic diagram, and (b) representative SEM image of MEMS capacitor array cross section.[
Development of small pixel HgCdTe infrared detectors |
(a) The 3D integrated LWIR FPA design schematic diagram, and (b) representative SEM image of MEMS capacitor array cross section.[ |
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