Mechanism of Ti/Al/Ni/Au ohmic contacts to AlGaN/GaN heterostructures via laser annealing<xref rid="cpb_28_3_037302fn1" ref-type="fn">*</xref><fn id="cpb_28_3_037302fn1"><label>*</label><p>Projects supported by the National Natural Science Foundation of China (Grant Nos. 51577169 and 51777187) and the National Key Research and Development Program of China (Grant No. 2017YFB0402804).</p></fn>

Mechanism of Ti/Al/Ni/Au ohmic contacts to AlGaN/GaN heterostructures via laser annealing**

Projects supported by the National Natural Science Foundation of China (Grant Nos. 51577169 and 51777187) and the National Key Research and Development Program of China (Grant No. 2017YFB0402804).

Hou Mingchen, Xie Gang^†, Sheng Kuang

The compound images of the scanning transmission electron microscope (STEM) and the EDS mappings for the metal layers of the (a) RTA sample and the (b) LA sample.