Stacked lateral double-diffused metal-oxide-semiconductor field effect transistor with enhanced depletion effect by surface substrate*

Project supported by the National Natural Science Foundation of China (Grant No. 61464003) and the Guangxi Natural Science Foundation, China (Grant Nos. 2015GXNSFAA139300 and 2018JJA170010).

Li Qi, Zhang Zhao-Yang, Li Hai-Ou, Sun Tang-You, Chen Yong-He, Zuo Yuan
       

(a) Schematic cross section of the proposed ST-LDMOS; (b) the charge distribution at off-state (VDS > 0, VGS = 0).