Controllable fabrication of self-organized nano-multilayers in copper–carbon films*

Project supported by the National Natural Science Foundation of China (Grant Nos. 51472250, U1637204, and 51775537).

Wang Wei-Qi1, 2, Ji Li2, †, Li Hong-Xuan2, ‡, Liu Xiao-Hong2, Zhou Hui-Di2, Chen Jian-Min2
       

Typical XPS C 1s peak of the films at various CH4 concentrations with the deposition time of (a) 5 minutes, (b) 20 minutes, and (c) 40 minutes.