Controllable fabrication of self-organized nano-multilayers in copper–carbon films<xref rid="cpb_28_3_036802_fn1" ref-type="fn">*</xref><fn id="cpb_28_3_036802_fn1"><label>*</label><p>Project supported by the National Natural Science Foundation of China (Grant Nos. 51472250, U1637204, and 51775537).</p></fn>

Controllable fabrication of self-organized nano-multilayers in copper–carbon films**

Project supported by the National Natural Science Foundation of China (Grant Nos. 51472250, U1637204, and 51775537).

Wang Wei-Qi^{1, 2}, Ji Li^{2, †}, Li Hong-Xuan^{2, ‡}, Liu Xiao-Hong², Zhou Hui-Di², Chen Jian-Min²

Deposition rate of the copper–carbon films as a function of the CH₄ concentration corresponding to 5 minutes, 20 minutes, and 40 minutes deposition times.