Preparation of Ga<sub>2</sub>O<sub>3</sub> thin film solar-blind photodetectors based on mixed-phase structure by pulsed laser deposition

Preparation of Ga₂O₃ thin film solar-blind photodetectors based on mixed-phase structure by pulsed laser deposition

Lu Y M^†, Li C, Chen X H, Han S, Cao P J, Jia F, Zeng Y X, Liu X K, Xu W Y, Liu W J, Zhu D L

The XRD (θ–2θ) patterns of the Ga₂O₃ films with various oxygen pressures (3.0–0.09 Pa) grown on a-Al₂O₃ 11 2 ¯ 0 substrates; the inset is the partial enlargement of the XRD patterns.