Review of deep ultraviolet photodetector based on gallium oxide

Qin Yuan^{1, 3}, Long Shibing^{2, 3, †}, Dong Hang^{1, 3}, He Qiming¹, Jian Guangzhong^{1, 3}, Zhang Ying^{1, 3}, Hou Xiaohu², Tan Pengju², Zhang Zhongfang², Lv Hangbing^{1, 3}, Liu Qi^{1, 3}, Liu Ming^{1, 3}

(a) The I–V characteristics of the MSM gallium oxide photodetectors in the dark and under illumination of 254 nm light in a semilogarithmic coordinate. (b) Dark current of the photodetectors on a linear scale. (c) Responsivity vs. illumination optical wavelength on a semilogarithmic scale and (d) normalized spectral response of the MSM gallium oxide photodetectors based on a-GaO_x (red) and β-Ga₂O₃ (blue) thin films. The inset in (d) shows the cutoff wavelength of the photodetectors.^[11]